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ASML Timeline 1984-2026: EUV Lithography & AI Chips

ASML is a Dutch company that makes lithography systems used by semiconductor manufacturers to print microscopic circuit patterns on silicon wafers. It is the o…

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ASML FOUNDED

ASML Is Founded as a Philips & ASM International Joint Venture

ASML began as a joint venture between electronics giant Philips and semiconductor-equipment company ASM International, entering a lithography-equipment market already do…

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COMPETING WITH NIKON & CANON

ASML Competes With Japan's Lithography Leaders as Chips Keep Shrinking

Nikon and Canon were the dominant lithography makers when ASML entered the market. Chipmakers needed to print smaller and smaller circuit patterns to fit more transistor…

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THE LONG EUV BET

ASML Commits to a Multi-Billion-Dollar Bet on EUV Lithography

ASML committed to developing extreme ultraviolet lithography with partners including light-source maker Cymer and optics specialist Zeiss, solving problems — powerful EU…

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EUV APPROACHES PRODUCTION

EUV Moves From Research Dream to Commercial Readiness

During the 2010s, EUV systems moved toward genuine commercial readiness. TSMC, Samsung and Intel all took direct equity stakes in ASML during this period specifically to…

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TSMC, SAMSUNG, INTEL ADOPT…

Leading Foundries Begin Using EUV for Advanced-Node Manufacturing

TSMC and Samsung began using EUV lithography in high-volume production for their most advanced process nodes around this period, with Intel following a more delayed path…

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AI DEMAND RESHAPES THE INDU…

AI Accelerators Sharply Increase Demand for Leading-Edge Chips

The rapid growth of large AI models and cloud AI infrastructure sharply increased demand for the most advanced GPUs and AI accelerators — and therefore for leading-edge…

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HIGH-NA EUV BEGINS

Intel Ships the First High-Volume Logic Chips Made With High-NA EUV

Intel installed one of the industry's first commercial High-NA EUV systems in 2024. In 2026, ASML confirmed Intel had become the first company to ship high-volume logic…

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BIC NORTH GROUNDBREAKING

ASML Breaks Ground on a Major New Dutch Manufacturing Campus

ASML held a groundbreaking ceremony for a new campus at Brainport Industries Campus North, on roughly 35 hectares of land near Eindhoven Airport. The project will eventu…

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LARGER-MASK TARGETS

ASML and Chipmakers Target Larger-Mask Systems for AI Data-Center Chips

Samsung and SK Hynix are targeting High-NA EUV for DRAM production around 2028. TSMC is looking toward advanced-node high-volume production from around 2030. ASML aims t…

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